Gasket aging or deformation can occur due to the high duty cycle of opening and closing the FOUP doors.
High-pressure jetting used for cleaning the
FOUP can
cause the gasket to become detached from the FOUP door.
Inspecting gaskets is a proactive maintenance practice that can ensure.
Yield enhancement, Safety, Process efficiency, and Proper functioning of the equipment.
- Negative Pressure Testing: prevent outside air from entering the FOUP
- Positive Pressure Testing: check the gasket status using a thermal camera
- FOUP door sealing
- Inlet/outlet valve function
- Gasket performance
■
Seal integrity
■
Safety concerns
■
Gas ingress preventionnili
■
Contamination prevention and reduction
■
Equipment Efficiency
■
Compliance & Quality Assurance
- Fast throughput
- Small footprint (1200mm*800mm*1700mm)
- Friendly HMI
- Data collection
- Fully automated system
■ RFID reader
■ Safety interlock protection
■ SECS/GEM and host communication
- Easy maintenance
■ Rail lubrication with oil
■ Nozzle head replacement
■ Thermal camera position calibration
