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High reliability, well experience
Load Port for 300mm is working in the front-end process all over the world.
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Particle free
① Original Door opening technology prevents particle penetration.
② Low vibration design.
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SEMI standard conformity
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CID communication
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Adaptor for open cassette is available
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Supporting N2 purge function
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Supporting various tape frame FOUP
*Upon inquiry
Applicable Carrier
・380mm Tape Frame 13, 25 slots
300mm FOUP and 200mm open cassette both can be used just by remounting!
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Automatic carrier identification function
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Mapping function
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Wafer-Out detection
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Many experiences
Tilt type
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Low cost model
Horizontal type
