Tegal 90x Series EtchersTegal 901e etch materials include polysilicon, refractory metal silicides and nitride. Tegal 903e silicon oxide single wafer, ether is able to remove various films to meet market demands. We are able to provide various upgrades to enhance system features. We also carry a complete line of new spares & repair parts at prices well below those of the OEM's level.
Product Offerings
Service
Alliance offers on-site maintenance services for Tegal 90X Series etching systems, supported by an extensive inventory of replacement parts. Our team of service engineers is equipped to address and rectify any operational and maintenance issues encountered with your Tegal® 90X Series etchers.
