各式工程模組產品

Loa​d Port Calibration JIG

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    Avoidance of falling door
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    300mm Door-JIG
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    Ensuring FOUP door & load port door vertical levelness
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    Making the operation smoother

Function FOUP Monitor

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    Detection of robot arm movement inside the FOUP for leveling/sliding/deviation
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    With alarm system to warn users
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    Operating all 25 slots in FOUP
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    Link with main tool system
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    Design with approved patent

Robot Arm Height Monitor

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    Robot arm position check
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    Avoidance of scratching and collision with precise and accurate reference data
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    FOUP door and load port door vertical levelness and checks

科群實業在半導體/面板/光電/研發產業領域耕耘多年，廣受客戶的信賴與肯定。
秉持著創新、服務、貼近客戶需求的理念，陸續開發出各式各樣的客製化產品，並針對創新研發申請專利。
因此，我們具備絕對的自信， 為您量身打造客製化服務，以下皆為我們的技術實績：

AEC offers integrated engineering services tailored to meet the specific needs of our customers, allowing them to concentrate on their core technologies.

(為保護客戶，部分圖片模糊示意處理)

Energy saving and carbon reduction

Gas control box

Environment control

EFEM Heating control module
control box

EFEM heating control module
with control box and  Temperature and humidity monitor

I​ndustrial safety products

Clean Vacuum Monitor System

Monitor products

Pressure Monitor

DRY Pump Current Monitor

Friction meter

UPS battery monitor

Saion backup battery kit for electrode amplifier

Water leakage detection

Thermostat Temperature Monitoring System

FFU differential pressure monitor

FFU pressure monitor

Current transformers
(5、10、25、50、100、250、500A)

Gas Control box

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    Tailor for various manufacturing industries, with a special focus on semiconductor manufacturing.
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    Design to optimize N2 supply by controlling and reducing usage rates when the machine is not in operation.
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    Achieved significant air-saving effects which contribute to energy conservation.
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    Successfully implemented in domestic semiconductor factories and demonstrated proven gas and energy savings.

EFEM Heating control module
Control Box

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    The humidity in the EFEM enviroment can be regulated and controlled through precision heaters.

EFEM Heating control module
Control Box temperature and humidity monitor

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    EFEM temperature/humidity detection (4~20mA analog signal output for remote monitor).

Clean Vacuum Monitor System

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    Vital for safety during maintenance, repair, and cleaning of conductor equipment; preventing exposure to reaction products, fine dust, organic gases, or toxic gases.
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    Essential for confirming the suction power of auxiliary exhaust facilities ensuring operator safety and preventy machin environmental pollution.
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    Currently adopted by leading domestic semiconductor manufacturers as a key industrial safety item.
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    Enhance safety protocols with our vacuum flow monitoring meter!

Pressure Monitor

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    Line pressure measurement

DRY Pump Current Monitor

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    Current monitor (0~50A)

Friction meter

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    Mobile and user-friendly surface roughness detector.
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    Utilizing torque meter technology where torque is influenced by material surface roughness.
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    Providing a quick and accurate assessment of material surface roughness.
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    Trusted by domestic semiconductor factories for setting standards and determining material usage based on surface roughness.

UPS battery monitor

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    Specifically designed for fire alarm systems like VESDA in devices such as ion implantation equipment.
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    Addressing the common issues of UPS batteries losing performance without detection during long periods of power stability.
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    Conducting regular discharge tests on a dummy load to assess battery current.
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    Issurans a warning for battery replacement when current falling below the standard.
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    Successfully deployed in a leading domestic semiconductor factories.

Saion backup battery kit for electrode amplifier

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    Memory battery voltage monitor.
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    Battery energy display.

Water leakage detection

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    For equipment Interlock Box and water leakage detection.

Thermostat Temperature Monitoring System

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    Multi-Point Monitoring: Connect and monitor up to 5 sets of values simultaneously.
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    Automatic Monitoring: Automatically monitors the temperature as per instructions, ensuring the thermostat stays within the set range.
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    Alert Function: Activates a red light and intermittent buzzer alarm if the thermostat temperature exceeds the set value.
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    Remote Connection: Supports remote connection with LAUDA thermostats for centralized monitoring.
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    This system is designed for precise thermostat temperature control, providing stable and reliable temperature monitoring for devices like LAUDA thermostats.

FFU differential pressure monitor

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    Specifically designed for monitoring pressure differences in microenvironments.
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    Essential for FFU installations in microenvironments to ensure optimal pressure conditions.
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    Enabled precise control of dust levels, safeguarding chip integrity.
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    Successfully deployed by domestic semiconductor manufacturers.

FFU pressure monitor

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    Output 0~10V or 4~20mA analog signals.

Current transformers
(5、10、25、50、100、250、500A)

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    Monitoring of operating current and output 0~5V analog signals.